Abradable silicone elastomer compound and use thereof
US9334435B2 · kind B2 · utility
1Cited by
6References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 22, 2013 |
| Grant date | May 10, 2016 |
| Priority date | — |
| Expiry date | Oct 22, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L24/01
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Addition curing silicone elastomers of high Shore D hardness are grindable and polishable, and are particularly useful as temporary adhesives in the processing of semiconductor wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.