Patent · US Active

MEMS component

US9335203B2 · kind B2 · utility

0Cited by

2References

7Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Jochen Zoellin · Memmingen, DE
Ricardo Ehrenpfordt · Gerlingen, DE
Juergen Graf · Stuttgart, DE
Christoph Schelling · Stuttgart, DE
Frederik Ante · Stuttgart, DE
Michael Curcic · Stuttgart, DE

Key dates

Filing date	Aug 28, 2013
Grant date	May 10, 2016
Priority date	—
Expiry date	Jul 29, 2034

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/0264
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A new signal acquisition concept is provided for MEMS components having a pressure-sensitive diaphragm element, which at least partially spans a pressure connection opening. This signal acquisition concept is distinguished by an especially high sensitivity. For this purpose, the MEMS component includes a resonant vibrator device having a vibrating element, which is suspended, capable of vibrating, within a closed cavity and is equipped with at least one drive electrode and at least one sensing electrode. The vibrating element of the resonant vibrator device is coupled mechanically to the diaphragm element, so that the vibrating element is deformed in the case of a diaphragm deflection.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.