Electrostatically steerable actuator
US9335544B2 · kind B2 · utility
0Cited by
19References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2013 |
| Grant date | May 10, 2016 |
| Priority date | — |
| Expiry date | Aug 24, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3564
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electrostatically steerable actuator includes a gimbaled platform. A central portion of a rear side of the platform extends outward from the platform. A diameter of the central portion is substantially smaller than a corresponding diameter of the platform. An array of electrodes faces the rear side of the platform to provide an adjustable electrostatic field for tilting the platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.