MEMS device
US9341840B2 · kind B2 · utility
2Cited by
0References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2012 |
| Grant date | May 17, 2016 |
| Priority date | — |
| Expiry date | Jun 13, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/06
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
According to the present invention there is provided a MEMS device comprising, a mirror which is connected to a fixed portion by means of a first and second torsional arm, each of the first and second torsional arms are configured such that they can twist about torsional axes so as to oscillate the mirror about a first oscillation axes, and wherein the first and second torsional arms are each configured to have two or more meanders and wherein the first and second torsional arms are arranged symmetrically relative to the first oscillation axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.