Patent · US Active

Transmission balancing for phase shift mask with a trim mask

US9341939B1 · kind B1 · utility

37Cited by

16References

21Claims

0Family size

Assignee

Seagate Technology LLC · US

Inventors

Dan Yu · Shakopee, US
Aaron M. Bowser · Windom, US
Yi-Cheng Liu · Baoshan, TW

Key dates

Filing date	Oct 30, 2014
Grant date	May 17, 2016
Priority date	—
Expiry date	Nov 4, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG03F9/7007
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Implementations described and claimed herein include photolithography technology to alleviate the imbalance of transmission intensity induced. In one implementation, a method comprises exposing an alternating phase shift mask (Alt-PSM) and a trim mask, wherein an exposure placement of the trim mask is shifted relative to an exposure placement of the Alt-PSM.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.