Method for controlling an RF generator
US9345122B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 30, 2015 |
| Grant date | May 17, 2016 |
| Priority date | — |
| Expiry date | Apr 30, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2242/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An RF generator and a method of controlling same includes an RF source; a DC source; and an RF amplifier comprising an RF input, a DC input, and an RF output, the RF amplifier configured to receive an RF signal at the RF input, receive a DC voltage at the DC input, and provide an output power at the RF output; a control unit operably coupled to the DC source and RF source, the control unit configured to receive a power setpoint for the RF output, determine a power dissipation at the RF generator, alter the DC voltage, and repeat the alteration of the DC voltage until determining a final DC voltage that decreases the power dissipation at the RF generator while enabling the output power at the RF output to be equal to or greater than the power setpoint.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.