Two dimensional material-based pressure sensor

US9347840B2 · kind B2 · utility

Assignees

• Xulite Semiconductor Products, Inc. · US
• The Trustees of Columbia University in the City of New York · US

Inventors

• Adam Hurst · New York, US
• Arend van der Zande · Urbana, US
• James Hone · New York, US

Key dates

• Filing date: Jul 18, 2014
• Grant date: May 24, 2016
• Expiry date: Aug 5, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L1/2287
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

This disclosure provides example methods, devices, and systems for a two dimensional material-based pressure sensor. A sensor device is provided that includes a substrate having a back electrode, a conductive layer in communication with the back electrode, and an insulating layer coupled to the conductive layer. The insulating layer includes one or more cavity regions. A sensor membrane comprising a two-dimensional material is disposed adjacent to the insulating layer and covering at least one of the one or more cavity regions. A first sensing electrode is in electrical communication with a first region of the sensor membrane, and a second sensing electrode is in communication with a second region of the sensor membrane. The sensor membrane is configured to respond to pressure changes exerted on the sensor device.