Patent · US Active

Photodetector with integrated microfluidic channel and manufacturing process thereof

US9349904B2 · kind B2 · utility

1Cited by

1References

23Claims

0Family size

Assignee

STMicroelectronics SA

Inventors

Alfio Russo · Loreto, IT
Giuseppina Valvo · Catania, IT

Key dates

Filing date	Jun 24, 2013
Grant date	May 24, 2016
Priority date	—
Expiry date	Feb 7, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/05
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A photodetector including: a photodiode having a body made of semiconductor material delimited by a first surface, the body forming a first electrode region; a dielectric region, set on top of the first surface and delimited by a second surface; at least one channel extending within the dielectric region, starting from the second surface; and a first metallization, which is set on top of the second surface and is in electrical contact with the first electrode region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.