MEMS module, variable reactance circuit and antenna device
US9350073B2 · kind B2 · utility
1Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2013 |
| Grant date | May 24, 2016 |
| Priority date | — |
| Expiry date | Feb 12, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02D30/70
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
Provided is a MEMS module that includes a MEMS element having a first capacitor electrode that can be displaced, a second capacitor electrode that opposes the first capacitor electrode, and driving electrodes that cause the first capacitor electrode to be displaced. The driving electrodes are connected to a control unit that applies a driving voltage to the driving electrodes and monitor terminals for detecting power. Thus, an element for monitoring power is not needed and a MEMS module, a variable reactance circuit and an antenna device are provided that are capable of realizing smaller size and lower loss.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.