Laser-ablation-based material analysis system with a power/energy detector
US9352418B2 · kind B2 · utility
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2References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 2, 2015 |
| Grant date | May 31, 2016 |
| Priority date | — |
| Expiry date | Jan 2, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/26
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser ablation system and methods are disclosed for performing material analysis. The laser ablation system includes a sample chamber which holds and encloses a sample material to be ablated; a laser source that produces a laser beam which is directed into the sample chamber to a surface of the sample material to cause laser ablation; a laser measuring device which is physically attached to the sample chamber to measure a power/energy value of the laser beam; and a material analyzing module that is coupled to the sample chamber to receive the ablated material from laser ablation of the sample material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.