Device and process for positioning individual particles on a substrate
US9352964B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Mar 13, 2012 |
| Grant date | May 31, 2016 |
| Priority date | — |
| Expiry date | Apr 10, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A device and process for positioning individual particles on a substrate is proposed. The device is equipped with at least one particle source which isolates particles of a defined material, with a focusing unit with an entry window facing the particle source and an exit window facing away from the particle source, with a substrate holder to hold the substrate, wherein the focusing unit guides the particles entering through its entry window into defined positions on the substrate, with at least one deflection unit arranged between the particle source and the focusing unit with an entry window facing the particle source and an exit window on the deflector unit facing away from the particle source, wherein the deflector unit preconditions the particles entering through its entry window before they reach the focusing unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.