Highly-reliable micro-electromechanical system temperature sensor
US9354125B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 7, 2013 |
| Grant date | May 31, 2016 |
| Priority date | — |
| Expiry date | Jul 29, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/11
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor arrangement for wirelessly measuring temperature and vibration is disclosed. The sensor arrangement includes a sensor element and a sensor coil affixed on the device. A readout coil is configured to be magnetically coupled to the sensor coil configured to energize the sensor coil with an energizing signal, configured to provide the natural frequency of the sensor element, the sensor coil, and the readout coil, and configured to provide amplitude modulations of the energizing signal, the amplitude modulations being induced by changes in the coupling factor of the readout coil and the sensor coil. An energizing circuit is configured to energize the readout coil with the energizing signal. A readout circuit is configured to store or display information regarding the natural frequency and the amplitude modulations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.