Method for polishing photonic chips
US9354393B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 2015 |
| Grant date | May 31, 2016 |
| Priority date | — |
| Expiry date | Jul 2, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12197
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for polishing photonic chips is described. A gauge is placed in a photonic chip adjacent to an edge to be polished. The gauge includes a set of bars of various lengths. The bar lengths can be progressively ordered from shortest to longest or vice versa. The photonic chip is then secured in a chip polishing jig to get ready for polishing. When the photonic chip is being polished, an operator can visually inspect the gauge by looking at the polishing edge to estimate a polishing depth in order to determine a stopping point for polishing. Once the stopping point has been reached, the polishing of the photonic chip can be stopped.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.