Patent · US Active

Optical apparatus

US9354434B2 · kind B2 · utility

0Cited by
3References
18Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJul 11, 2012
Grant dateMay 31, 2016
Priority date
Expiry dateDec 31, 2032

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B27/0988
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Provided is an optical apparatus characterized in that alight from a light source is split to a first light and a second light, and the first light is focused onto an observation object, that an optical filter having a light shielding region for high resolution is disposed in at least one optical path selected from optical paths of the first light, second light and response light from the observation object, that an interference light formed by causing interference between the response light and the reference light in polarized states different from each other is split to multiple beams, and desired amplitude information signals are obtained from the multiple beams through a phase plate and a polarization plate to increase intensity of the second light, whereby the signal to noise ratio is improved.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.