Large-area plasma generating apparatus
US9355821B2 · kind B2 · utility
8Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2013 |
| Grant date | May 31, 2016 |
| Priority date | — |
| Expiry date | Dec 12, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32091
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A large-area plasma generating apparatus is disclosed, which includes a reaction chamber; a first electrode disposed in the reaction chamber; a second electrode parallel with the first electrode and disposed in the reaction chamber; and a discharge region formed between the first and second electrodes and a plasma can be formed therein; wherein a travelling wave or a traveling-wave-like electromagnetic field is generated via at least one of the first and second electrodes and travels from one end of the discharge region to its opposite end, so as to uniform the plasma in the discharge region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.