Method of making magnetic core inductor integrated with multilevel wiring network
US9357650B2 · kind B2 · utility
1Cited by
17References
6Claims
0Family size
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Inventor
Key dates
| Filing date | Sep 13, 2012 |
| Grant date | May 31, 2016 |
| Priority date | — |
| Expiry date | Sep 10, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4913
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An inductor is integrated into a multilevel wiring network of a semiconductor integrated circuit. The inductor includes a planar magnetic core and a conductive winding. The conductive winding turns around in generally spiral manner on the outside of the planar magnetic core. The conductive winding is piecewise constructed of wire segments and of VIAs. The wire segments pertain to at least two wiring planes and the VIAs are interconnecting the at least two wiring planes. Methods for such integration, and for fabricating laminated planar magnetic cores are also presented.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.