Substrate ion exchange systems with single- and multi-component ion exchange baths and methods for maintaining such systems
US9359250B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 28, 2014 |
| Grant date | Jun 7, 2016 |
| Priority date | — |
| Expiry date | Jun 16, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C21/005
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A substrate ion exchange system, along with methods of maintain such a system, is provided that includes a substrate having an outer region containing a plurality of substrate metal ions, an ion exchange bath that includes a plurality of first metal ions at a first metal ion concentration and a plurality of second metal ions at a second metal ion concentration, and a vessel for containing the ion exchange bath and the substrate. The ion exchange system also includes a temperature sensor coupled to the vessel, and a processor configured to receive a vessel temperature from the sensor and to evaluate the first metal ion concentration based at least in part on a first metal ion consumption rate relationship and the vessel temperature. Further, the first metal ion consumption rate relationship is predetermined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.