β-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same
US9359382B2 · kind B2 · utility
0Cited by
1References
2Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jun 27, 2014 |
| Grant date | Jun 7, 2016 |
| Priority date | — |
| Expiry date | Aug 16, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/18
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
The β-ketoimine ligand is represented by the following formula 1:wherein R1 and R2 are each independently a C1-C5 alkyl group. A metal complex compound includes the β-ketoimine ligand. A method of forming the β-ketoimine ligand and a method of forming a thin film using the metal complex compound including β-ketoimine ligand are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.