Tactile microprobe arm fastened to freestanding end of an optical fiber
US9360305B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 10, 2012 |
| Grant date | Jun 7, 2016 |
| Priority date | — |
| Expiry date | Nov 22, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/026
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for the tactile determination of a surface shape of a measuring object includes a micro probe arm having a stylus tip, the micro probe arm being fastened on an optical fiber having a fiber end, which is mounted in a probe housing, a reference mirror is provided in the probe housing, and an optical measuring device is provided for determining the position of the fiber end in relation to the reference mirror. The contactless interferometric determination of the distance between the fiber end of the optical fiber and the reference mirror attached in the probe housing allows precise determination of the surface shape of the measuring object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.