Multi-axis tilt sensor for correcting gravitational effects on the measurement of pressure by a capacitance diaphragm gauge
US9360391B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 25, 2014 |
| Grant date | Jun 7, 2016 |
| Priority date | — |
| Expiry date | Sep 25, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L27/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method compensate for effects of gravity on the diaphragm of a capacitance diaphragm gauge (CDG). The CDG generates a measured absolute pressure value in response to an applied absolute pressure on an input of the CDG. The CDG is subjected to a variable orientation of the CDG with respect to the earth's surface that can cause inaccurate pressure measurements. A pressure measuring circuit generates a measured value of an applied absolute pressure provided to an input of the CDG. A tilt sensor generates at least one tilt sensor output value that is responsive to an orientation of the CDG with respect to the earth's surface. A processing system adjusts the measured absolute pressure value by a calibration factor to generate a calibrated absolute pressure value representing the applied absolute pressure, wherein the calibration factor is selected in response to the at least one tilt sensor output value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.