Device for calibrating a scatterometer
US9360424B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 14, 2013 |
| Grant date | Jun 7, 2016 |
| Priority date | — |
| Expiry date | Jun 7, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/127
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A calibration device is described for calibrating a scatterometer, which is designed in particular for measuring a particle concentration in exhaust gases of motor vehicles. The calibration device has at least one scattering body which emits scattered light having a defined intensity and distribution when irradiated with a light beam, the scattering body having an emission surface for the scattered light, to which is assigned at least one light sensor for detecting the scattered light exiting the emission surface. A screening body having at least one screen opening through which the scattered light exits in the direction of the at least one light sensor is assigned to the emission surface of the scattering body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.