Patent · US Active

Field asymmetric ion mobility spectrometry filter

US9362099B2 · kind B2 · utility

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Key dates

Filing dateJan 3, 2013
Grant dateJun 7, 2016
Priority date—
Expiry dateJan 3, 2033

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49149
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.