Patent · US Active

Method for chip package

US9362173B2 · kind B2 · utility

0Cited by
12References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 18, 2011
Grant dateJun 7, 2016
Priority date
Expiry dateOct 18, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/15788
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Provided is a method for chip packaging, including the steps of: providing a semi-packaged wafer which has a cutting trail and a metal bonding pad of the chip; forming on the metal bonding pad a sub-ball metal electrode, using a selective formation process; forming a protective layer on the wafer in a region not including the sub-ball metal electrode, with the protective layer covering the cutting trail; forming a solder ball on the sub-ball metal electrode; dicing the wafer along the cutting trail. The present invention can prevent metal in the cutting trail from being affected during the production of the sub-ball metal electrode, and protect the lateral sides of a discrete chip after cutting. The process flow thereof is simple, and enhances the efficiency of the packaging as well as its yield.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.