Etching solutions
US9365935B2 · kind B2 · utility
0Cited by
11References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 2, 2014 |
| Grant date | Jun 14, 2016 |
| Priority date | — |
| Expiry date | Jun 2, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23F1/14
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
The present invention provides an etching solution for silver or silver alloy comprising one at least ammonium compound represented by the formula (1), (2) or (3) below and an oxidant:wherein each of the variables is as defined herein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.