Patent · US Active

Serially-connected ball screw pair and piezoelectric actuator macro-micro driving and guiding device

US9366327B2 · kind B2 · utility

0Cited by
4References
6Claims
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Assignee

Inventors

Key dates

Filing dateOct 26, 2011
Grant dateJun 14, 2016
Priority date
Expiry dateJun 10, 2032

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T74/18656
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

A serially-connected ball screw pair and piezoelectric actuator macro-micro driving and guiding device includes, from the bottom to the top, a sliding seat (1), a ball screw pair, a sliding table guide rail pairs, a nut seat (6), a piezoelectric actuator (7), a micro-moving table, a nut seat guide rail pairs and a sliding table (1). The axis of a ball screw is symmetric with respect to two sliding table rail pairs, a nut (3) of the ball screw pair is fixedly mounted into the nut seat (6), one end of the piezoelectric actuator (7) is fixedly connected with the nut seat (6) and the other end thereof is fixedly connected with the micro-moving table (8), the axis of the piezoelectric actuator is symmetric relative to two sliding table rail pairs, an upper surface of the micro-moving table is fixedly mounted to a lower surface of the sliding table, and two nut rail pairs are symmetric relative to the axis of the ball screw. The ultra precision feeding in a long stroke within a full journey can be achieved; and the piezoelectric actuator only endures the driving force without enduring the driving torque generated by the driving force of the ball screw pair, thus, so that the piezoelectri…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.