Device for measuring force components, and method for its production
US9366585B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 24, 2013 |
| Grant date | Jun 14, 2016 |
| Priority date | — |
| Expiry date | Jan 4, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0857
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for measuring force components formed from a single crystal material, wherein the device comprises at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, which mass body provides a mass of inertia. The mass body has a first and a second major surface which are substantially parallel with a wafer plane. A mass body cross section presents a portion which is substantially symmetrical along a centrally (in the thickness direction) located plane parallel with the wafer plane. Disclosed is also a method for its production and an accelerometer comprising at least one such device. The device allow for a more compact 3-axis accelerometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.