Vibration tolerant acceleration sensor structure
US9366690B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Jan 11, 2013 |
| Grant date | Jun 14, 2016 |
| Priority date | — |
| Expiry date | May 20, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS structure comprises an anchor, a spring, and a seismic mass that is suspended to the anchor via the spring to pivot around an axis of rotation. Errors from unwanted vibration modes are reduced by including in the MEMS structure a spring structure that extends from the seismic mass to the anchor. Said spring structure comprises a side arm that is connected to the seismic mass or the anchor. At least part of the spring structure is formed by a side arm that extends in the spring structure in a direction parallel to the axis of rotation of the seismic mass; and is attached to one end of the spring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.