Variable density scanning
US9366693B2 · kind B2 · utility
2Cited by
13References
22Claims
0Family size
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Key dates
| Filing date | Jun 30, 2015 |
| Grant date | Jun 14, 2016 |
| Priority date | — |
| Expiry date | Jun 30, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q10/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.