Patent · US Active

MEMS membrane overtravel stop

US9369804B2 · kind B2 · utility

3Cited by

5References

11Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Thomas Buck · Tamm, DE
John W. Zinn · Schoutenkamp, US
Andy Doller · Shaler Township, US
Brett Diamond · Pittsburgh, US
Bernhard Gehl · Wannweil, DE

Key dates

Filing date	Jul 28, 2014
Grant date	Jun 14, 2016
Priority date	—
Expiry date	Jul 28, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2207/021
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A micro electrical mechanical system (MEMS) device in one embodiment includes a substrate defining a back cavity, a membrane above the back cavity, a back plate above the membrane, and a first overtravel stop (OTS) positioned at least partially directly beneath the membrane and supported by the back plate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.