Patent · US Active

MEMS component for generating pressure pulses

US9369809B2 · kind B2 · utility

2Cited by

2References

8Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Jochen Zoellin · Memmingen, DE
Ricardo Ehrenpfordt · Gerlingen, DE
Rolf Scheben · Stuttgart, DE

Key dates

Filing date	Dec 18, 2013
Grant date	Jun 14, 2016
Priority date	—
Expiry date	Jun 4, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2460/03
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A MEMS component for generating pressure pulses is provided, its micromechanical structure including at least three function levels: a first function level in which at least one stationary trench structure is implemented, a second function level, which is implemented above the first function level and includes at least one triggerable displacement element as well as through-openings as pressure outlet openings, the displacement element protruding into the trench structure and being movable in parallel with the function levels, whereby positive and negative pressure pulses are generated, and a third function level, which is implemented above the second function level and includes at least one triggerable cover element for at least one part of the pressure outlet openings in the second function level.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.