Device, arrangement, and method for the interference structuring of planar samples

US9370843B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Andres Fabian Lasagni · Dresden, DE
• Eckhard Bever · Dresden, DE
• Teja Roch · Dresden, DE

Key dates

• Filing date: Feb 9, 2012
• Grant date: Jun 21, 2016
• Expiry date: Apr 8, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G03H2001/0482
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

The invention relates to a device (and a corresponding method) for the interference structuring of a planar sample, comprising a laser, a focusing element, which is arranged in the beam path of the laser and by means of which the laser radiation can be focused in a first spatial direction, a first prism, in particular a biprism, which is arranged in the beam path of the laser and by means of which the laser radiation can be directed at a sample volume in a second spatial direction preferably perpendicular to the first spatial direction by means of two beams, in such a way that the two beams interfere within the sample volume in an interference area, the sample volume, in which the planar sample is or can be placed in the interference area, and a moving unit, by means of which the beam(s) of the laser radiation can be moved in the first, the second, or the first and second spatial directions and/or by means of which a/the sample can be moved in the sample volume in the first, the second, or the first and second spatial directions.