Comb drive including a pivotable mirror element

US9372341B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Hans Artmann · Magstadt, DE
• Jochen Reinmuth · Reutlingen, DE
• Peter Sudy · Reutlingen, DE

Key dates

• Filing date: Dec 9, 2014
• Grant date: Jun 21, 2016
• Expiry date: Jan 7, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0816
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A comb drive includes a pivotable mirror element, a first and a second comb electrode, the second comb electrode being movable along an offset direction relative to the first electrode from a minimum into a maximum offset position, the second electrode being connected to the mirror element via a lever arm pivotable about a pivot axis, the first and second comb electrodes being interlockingly engaged so that a first comb tooth of the first electrode and a second comb tooth of the second electrode are situated adjacent to one another along a projection direction extending perpendicularly to the offset direction, the first comb tooth and/or the second comb tooth being configured so that an average distance between the first comb tooth and the second comb tooth along the projection direction extending perpendicularly to the offset direction decreases when moving the second electrode from the minimum into the maximum offset position.