Robust modulator circuits using lateral doping junctions
US9372381B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2013 |
| Grant date | Jun 21, 2016 |
| Priority date | — |
| Expiry date | Oct 18, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/126
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed herein are methods, structures, and devices that compensates for modulator loss and modulation inefficiencies introduced by mask misalignments in opposite oriented pn type junction modulators. More specifically, Mach-Zehnder type optical modulators are disclosed wherein both arms in the MZI modulator are arranged in a push-pull configuration and configured to experience pn type junctions of two orientations wherein both arms further configured to experience the same length of waveguide with a pn type junction of each orientation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.