Routing of MEMS variable capacitors for RF applications
US9373447B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2012 |
| Grant date | Jun 21, 2016 |
| Priority date | — |
| Expiry date | Dec 25, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/43
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Utilizing a variable capacitor for RF and microwave applications provides for multiple levels of intra-cavity routing that advantageously reduce capacitive coupling. The variable capacitor includes a bond pad that has a plurality of cells electrically coupled thereto. Each of the plurality of cells has a plurality of MEMS devices therein. The MEMS devices share a common RF electrode, one or more ground electrodes and one or more control electrodes. The RF electrode, ground electrodes and control electrodes are all arranged parallel to each other within the cells. The RF electrode is electrically connected to the one or more bond pads using a different level of electrical routing metal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.