Lithium microbattery fabrication method
US9373864B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 29, 2014 |
| Grant date | Jun 21, 2016 |
| Priority date | — |
| Expiry date | Dec 1, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The method for fabricating a lithium microbattery is performed from a stack of layers successively including: a first layer made from a first material, a second layer made from a second material, a solid electrolyte layer and a first electrode. The method further includes etching to form a first pattern made from the first material and a second pattern made from the second material, the second pattern defining a covered area and an uncovered area of the electrolyte layer. The uncovered area is then etched using the second pattern as etching mask. After etching of the first pattern, a lithium-based layer is formed on the second pattern, the lithium-based layer and the second pattern forming a second lithium-based electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.