Film bulk acoustic resonator filter
US9374059B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 6, 2015 |
| Grant date | Jun 21, 2016 |
| Priority date | — |
| Expiry date | Jan 7, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/1014
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator comprising a substantially horizontal membrane of piezoelectric material with upper and lower metal electrodes on its upper and lower faces, said membrane being attached around its perimeter to the inner side walls of a rectangular interconnect frame by an attaching polymer, the side walls of the package frame being substantially perpendicular to the membrane and comprising conducting vias within a dielectric matrix, the conducting vias running substantially vertically within the side walls, the metal electrodes being conductively coupled to the metal vias by a feature layer over the upper surface of the membrane and top and bottom lids coupled to top and bottom ends of the interconnect frame to seal the acoustic resonator from its surroundings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.