Photoreflectance device
US9377300B2 · kind B2 · utility
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13References
8Claims
0Family size
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Key dates
| Filing date | Dec 9, 2013 |
| Grant date | Jun 28, 2016 |
| Priority date | — |
| Expiry date | Dec 9, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/065
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A photoreflectance device for characterizing a rough surface includes a pump beam emitter to emit a pump beam; a probe beam emitter to emit a probe beam; a detector to detect the probe beam reflected by the surface; an integrating sphere to collect the probe beam reflected by the surface, the integrating sphere including: a first output connected to the detector, and disposed so as to receive a majority of the probe beam reflected by the surface; a second output arranged so as to receive a majority of the pump beam reflected by the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.