Patent · US Active

Distinguishing foreign surface features from native surface features

US9377394B2 · kind B2 · utility

2Cited by
58References
20Claims
0Family size

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Key dates

Filing dateSep 19, 2013
Grant dateJun 28, 2016
Priority date
Expiry dateJan 6, 2034

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/95
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Provided herein is an apparatus, including a photon detector array; and a processing means configured for processing photon-detector-array signals corresponding to a first set of photons scattered from surface features of an article focused in a first focal plane and a second set of photons scattered from surface features of an article focused in a second focal plane, wherein the processing means is further configured for distinguishing foreign surface features of the article from foreign native features of the article.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.