Distinguishing foreign surface features from native surface features
US9377394B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2013 |
| Grant date | Jun 28, 2016 |
| Priority date | — |
| Expiry date | Jan 6, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided herein is an apparatus, including a photon detector array; and a processing means configured for processing photon-detector-array signals corresponding to a first set of photons scattered from surface features of an article focused in a first focal plane and a second set of photons scattered from surface features of an article focused in a second focal plane, wherein the processing means is further configured for distinguishing foreign surface features of the article from foreign native features of the article.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.