Scanning acoustic microscope with an inverted transducer and bubbler functionality
US9377443B2 · kind B2 · utility
2Cited by
29References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2014 |
| Grant date | Jun 28, 2016 |
| Priority date | — |
| Expiry date | Sep 2, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/2697
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning acoustic microscope includes a transducer mounted in a cup below a particular elevation capable of producing ultrasonic energy and a coupling fluid source disposed below the particular elevation, which is configured to introduce coupling fluid into the cup. Ultrasonic energy is directed upwardly through coupling fluid disposed between and contacting the transducer and a first surface of a part to be inspected. The part is disposed at the particular elevation such that a second surface of the part is not contacted by coupling fluid during testing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.