Patent · US Active

Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical gyroscope

US9377483B2 · kind B2 · utility

1Cited by
9References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 17, 2011
Grant dateJun 28, 2016
Priority date
Expiry dateSep 8, 2033

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01C19/5726
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method for the precise measuring operation of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (qi) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between said trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũT, ŨT,0) and a restoring variable (ũS).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.