Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical gyroscope
US9377483B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2011 |
| Grant date | Jun 28, 2016 |
| Priority date | — |
| Expiry date | Sep 8, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5726
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for the precise measuring operation of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (qi) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between said trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũT, ŨT,0) and a restoring variable (ũS).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.