Mask manufacturing apparatus and method of manufacturing mask using laser beam
US9377681B2 · kind B2 · utility
1Cited by
3References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2013 |
| Grant date | Jun 28, 2016 |
| Priority date | — |
| Expiry date | Jul 2, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/067
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A mask manufacturing apparatus includes a laser irradiator, a stage, a frame, and a heat spreader sheet. The laser irradiator divides a laser beam into a plurality of sub-laser beams and irradiates the sub-laser beams to a shadow mask material which is placed over a stage. The frame is disposed over the stage to support the shadow mask material. The heat spreader sheet makes contact with the shadow mask material, absorbs heat generated from the shadow mask material, and dissipates the heat to surroundings of the shadow mask material. Accordingly, the shadow mask material is protected from overheating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.