Photoelectric conversion element, method of manufacturing photoelectric conversion element, and electronic device
US9379278B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Apr 3, 2015 |
| Grant date | Jun 28, 2016 |
| Priority date | — |
| Expiry date | Apr 3, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A method of manufacturing a photoelectric conversion element includes: forming a first electrode film such that a first conductive film is connected with a substrate and a second conductive film is connected with the first conductive film; patterning the second conductive film in a predetermined shape using wet etching after the forming of the first electrode film; and forming a metal compound film to cover the first electrode film after the patterning of the second conductive film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.