Robot and substrate handling apparatus including the same
US9381653B2 · kind B2 · utility
2Cited by
45References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 10, 2015 |
| Grant date | Jul 5, 2016 |
| Priority date | — |
| Expiry date | Mar 10, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67766
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
The robot including a main body, an arm connected to the main body, a hand connected to the arm, the hand including a hand base and a finger, and a hand bracket unit between the hand base and the finger or between the hand base and the arm, may be provided. The hand bracket unit may include a vibration damping member provided between the hand base and the finger or between the hand base and the arm, thereby damping vibration of the hand base or the finger.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.