Inkjet printhead substrate, method of manufacturing the same, and inkjet printhead
US9381741B2 · kind B2 · utility
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1References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2015 |
| Grant date | Jul 5, 2016 |
| Priority date | — |
| Expiry date | Jul 8, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/1408
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An inkjet printhead substrate includes a base plate, a heat storage layer placed on the base plate, a heat-generating resistive layer which is placed on the heat storage layer and which includes an electrothermal transducing portion, a wiring layer electrically connected to the heat-generating resistive layer, and an insulating protective layer covering the heat-generating resistive layer and the wiring layer. The heat storage layer includes a porous cyclic silazane film formed by a vapor phase process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.