Method for the production of silicon from silyl halides
US9382122B2 · kind B2 · utility
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26References
11Claims
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Assignee
Inventor
Key dates
| Filing date | Feb 16, 2012 |
| Grant date | Jul 5, 2016 |
| Priority date | — |
| Expiry date | Feb 16, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/0894
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention relates to a method for the production of silicon from silyl halides. In a first step, the silyl halide is converted, with the generation of a plasma discharge, to a halogenated polysilane, which is subsequently decomposed to silicon, in a second step, with heating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.