Device for closing an opening in a chamber wall
US9383037B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 17, 2010 |
| Grant date | Jul 5, 2016 |
| Priority date | — |
| Expiry date | Nov 17, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/186
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Device for closing an opening in a chamber wall of a low-pressure or vacuum chamber, having at least one movably mounted closure element, a main body with a through-opening and a seat, which surrounds the through-opening, the through-opening is congruent with the opening in the chamber wall, and the device has at least one open position of the closure element, in which the through-opening is exposed by the closure element, and at least one closed position, in which the through-opening is completely closed using the closure element. At least one elastic seal with an inflatable chamber is sealingly arranged in the closed position between the closure element and the seat and the elastic seal has in addition to the inflatable chamber a safety chamber for receiving fluid from the inflatable chamber in the event of a leak in the inflatable chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.