Measuring apparatus and method for determining dimensional characteristics of a measurement object

US9383190B1 · kind B1 · utility

Assignee

• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• David Shafer · Fairfield, US
• Markus Seesselberg · Aalen, DE
• Aksel Goehnermeier · Aalen, DE
• Norbert Kerwien · Mögglingen, DE
• Thomas Engel · Aalen, DE

Key dates

• Filing date: Dec 10, 2014
• Grant date: Jul 5, 2016
• Expiry date: Jan 27, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J3/28
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A measuring apparatus and method for determining dimensional characteristics of a measurement object use a sensor head in order to register desired measurement points on the measurement object. The sensor head comprises a polychromatic light source for generating light having various wavelengths of light, a spectrometer, and an optical system having at least one lens element. The optical system produces a first defined range of color dependent foci and a second defined range of color dependent foci in front of the at least one lens element. The spectrometer generates a first spectral information when the measurement object is in the first defined range, and it generates a second spectral information when the measurement object is in the second defined range. An evaluation unit exploits the first spectral range in a coarse measurement mode, and it exploits the second spectral range in a fine measurement mode.