Optical measurement system with polarization compensation, and corresponding method

US9383272B2 · kind B2 · utility

Assignee

• TECHNISCHE UNIVERSITÄT MÜNCHEN · DE

Inventors

• Thorbjörn Buck · Birkenfeld, DE
• Lars Hoffmann · Birkenfeld, DE
• Mathias Müller · Viersen, DE
• Rolf Wojtech · Birkenfeld, DE

Key dates

• Filing date: Jun 4, 2013
• Grant date: Jul 5, 2016
• Expiry date: Jun 4, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G01D5/35303
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for the adjustment of an optical measurement system comprises providing an optical measurement system, which comprises, as optical elements, a beam splitter; a first photo sensor, exposed by a first partial beam from the beam splitter; an optical filter; a second photo sensor, arranged downstream of the optical filter, exposed by a second partial beam from the beam splitter. Additionally, the angularity and relative position between multiple optical elements is designed to be adjustable. The method further comprises providing a device for generating a difference signal from the two photo sensors; providing a light source with periodically varying polarization; irradiating the light in the beam splitter, so that the two respective photo sensors are exposed by a partial beam; generating a difference signal of the output signals of the photo sensors; varying the position and/or angularity of at least one optical element, and observing the difference signal, determine the combination of angularity/position of the elements where a minimum difference signal is achieved, and configuring the angularity of the optical elements to the determined values. Further, a corresponding syst…