MEMS capacitive pressure sensor, operating method and manufacturing method
US9383282B2 · kind B2 · utility
22Cited by
8References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 2012 |
| Grant date | Jul 5, 2016 |
| Priority date | — |
| Expiry date | Aug 28, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L27/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS pressure sensor wherein at least one of the electrode arrangements comprises an inner electrode and an outer electrode arranged around the inner electrode. The capacitances associated with the inner electrode and the outer electrode are independently measured and can be differentially measured. This arrangement enables various different read out schemes to be implemented and also enables improved compensation for variations between devices or changes in device characteristics over time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.