MEMS resonator pressure sensor
US9383285B2 · kind B2 · utility
12Cited by
1References
13Claims
0Family size
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Key dates
| Filing date | Sep 23, 2013 |
| Grant date | Jul 5, 2016 |
| Priority date | — |
| Expiry date | Aug 12, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0092
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A resonant MEMS pressure sensor in which the resonator mass of the MEMS resonator is anchored both to the fixed base beneath the resonator cavity as well as to the top membrane over the resonator cavity. This provides a more robust fixing of the resonator mass and offers a dependence of resonant frequency on the pressure outside the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.